Atomic-scale and optical investigation of nanostructured Er disilicates in silica

The optical and structural properties of Er-doped Silicon oxide based thin films elaborated by RF magnetron sputtering were investigated as a function annealing treatment. Atom Probe Tomography Transmission electron microscopy used to analyze the position rare-earth ions well phase separation occurring in layer order provide complete picture nanostructure. emission Er3+ using cathodoluminescence (CL) spectroscopy. high doping level Er silicon matrix leads decomposition pure SiO2 Er2Si2O7 phases with nanostructure which is influenced It results on different intensities ultraviolet or infrared ranges. relationship between nanostructuration observed discussed regards